VOC Adsorbent for High-Humidity Semiconductor Exhaust Specifications
Standard Specifications
| Parameter | ZC-VOC-P1 / P2 | ZC-VOC-P3 / P4 |
|---|---|---|
| Form factor | Solid rod | Hollow rod |
| Particle size | 2.5-3.5 mm dia × 5-15 mm | 2.5-3.5 mm dia × 5-15 mm |
| Bulk density | 0.55-0.65 kg/L | 0.35-0.45 kg/L |
| Crushing strength | ≥ 30 N/cm | ≥ 20 N/cm |
| Pore diameter | 0.35-0.80 nm | 0.35-0.80 nm |
| Static n-hexane adsorption (P1/P3) | ≥ 9.0 wt% | ≥ 9.0 wt% |
| Static n-hexane adsorption (P2/P4) | ≥ 10.0 wt% | ≥ 10.0 wt% |
| Static xylene adsorption (P1/P3) | ≥ 13.0 wt% | ≥ 13.0 wt% |
| Static xylene adsorption (P2/P4) | ≥ 15.0 wt% | ≥ 15.0 wt% |
| Appearance | White, beige or grey rods | White, beige or grey hollow rods |
Operating Parameters
| Parameter | Range |
|---|---|
| Target humidity | > 80% RH |
| Regeneration temperature | 200-350 deg C |
| Regeneration atmosphere | Air or inert gas |
| VOCs adsorbed | BTEX, C1-C10 alcohols, esters, aldehydes, ketones, aliphatic hydrocarbons (especially effective for non-polar organics) |
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